Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

Isak I. Beilis, A. Shashurin, A. Nemirovsky, R. L. Boxman, S. Goldsmith

Research output: Contribution to journalArticlepeer-review

Abstract

The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.

Original languageEnglish
Pages (from-to)408-409
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
StatePublished - Apr 2005

Keywords

  • Anode heating
  • Anode temperature
  • Asymmetric anode
  • Hot refractory anode
  • Macroparticle free
  • Plasma plume
  • Plasma source
  • Vacuum arc
  • Vacuum arc deposition

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