Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

Isak I. Beilis; A. Shashurin; A. Nemirovsky; R. L. Boxman; S. Goldsmith

doi:10.1109/TPS.2005.845015

Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

Isak I. Beilis^*, A. Shashurin, A. Nemirovsky, R. L. Boxman, S. Goldsmith

^*Corresponding author for this work

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.

Original language	English
Pages (from-to)	408-409
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2005.845015
State	Published - Apr 2005

Keywords

Anode heating
Anode temperature
Asymmetric anode
Hot refractory anode
Macroparticle free
Plasma plume
Plasma source
Vacuum arc
Vacuum arc deposition

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10.1109/TPS.2005.845015

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@article{731b51c90356473a9c24a3be4dda0168,

title = "Imaging of the anode plasma plume development in a hot refractory anode vacuum arc",

abstract = "The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.",

keywords = "Anode heating, Anode temperature, Asymmetric anode, Hot refractory anode, Macroparticle free, Plasma plume, Plasma source, Vacuum arc, Vacuum arc deposition",

author = "Beilis, {Isak I.} and A. Shashurin and A. Nemirovsky and Boxman, {R. L.} and S. Goldsmith",

note = "Funding Information: Manuscript received June 14, 2004. This work was supported by a grant from the Israel Science Foundation under the Israel Academy of Sciences and Humanities.",

year = "2005",

month = apr,

doi = "10.1109/TPS.2005.845015",

language = "אנגלית",

volume = "33",

pages = "408--409",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 I",

}

TY - JOUR

T1 - Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

AU - Beilis, Isak I.

AU - Shashurin, A.

AU - Nemirovsky, A.

AU - Boxman, R. L.

AU - Goldsmith, S.

N1 - Funding Information: Manuscript received June 14, 2004. This work was supported by a grant from the Israel Science Foundation under the Israel Academy of Sciences and Humanities.

PY - 2005/4

Y1 - 2005/4

N2 - The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.

AB - The hot refractory anode vacuum arc (HRAVA) is a plasma source where the source of the plasma flux is re-evaporation from the surface of a refractory anode of material originally emitted from the cathode. This plasma is used to deposit metallic films with small macroparticle contamination. Photographs of different stages of the development of the HRAVA are presented, allowing tracing of the details the development and giving characteristic times of the HRAVA development.

KW - Anode heating

KW - Anode temperature

KW - Asymmetric anode

KW - Hot refractory anode

KW - Macroparticle free

KW - Plasma plume

KW - Plasma source

KW - Vacuum arc

KW - Vacuum arc deposition

UR - http://www.scopus.com/inward/record.url?scp=18844446432&partnerID=8YFLogxK

U2 - 10.1109/TPS.2005.845015

DO - 10.1109/TPS.2005.845015

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:18844446432

SN - 0093-3813

VL - 33

SP - 408

EP - 409

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 2 I

ER -

Imaging of the anode plasma plume development in a hot refractory anode vacuum arc

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Keywords

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