TY - JOUR
T1 - Hyperthermal gas-surface scattering
AU - Weiss, P. S.
AU - Amirav, A.
AU - Trevor, P. L.
AU - Cardillo, M. J.
N1 - Funding Information:
Acknowledgement. This paper is supported by the EU under the large-scale integrating project (IP) Optique (Scalable End-user Access to Big Data), grant agreement n. FP7-318338. We thank Héctor Pérez-Urbina for his support in evaluating Stardog.
PY - 1988/5
Y1 - 1988/5
N2 - We summarize our recent results of scattering hyperthermal (1–15 eV) rare-gas atoms from single-crystal semiconductors. These include collisional excitation of carriers in the semiconductor, the ejection of charged and neutral surface particles, and the projectile scattering distributions characteristic of the strongly inelastic collisions. The dependence of the electronic excitation of the semiconductor upon the incident energy, angle, and atom are consistent with the creation of a local thermal hot spot with which there is fast electronic equilibration. In contrast, for the ejection of ions from the surface, the incident and ejected particle energy and angle distributions suggest direct, large momentum-transfer processes. The scattered rare-gas atom distributions exhibit large energy loss, yet are strongly structured and surprisingly sensitive to surface topography.
AB - We summarize our recent results of scattering hyperthermal (1–15 eV) rare-gas atoms from single-crystal semiconductors. These include collisional excitation of carriers in the semiconductor, the ejection of charged and neutral surface particles, and the projectile scattering distributions characteristic of the strongly inelastic collisions. The dependence of the electronic excitation of the semiconductor upon the incident energy, angle, and atom are consistent with the creation of a local thermal hot spot with which there is fast electronic equilibration. In contrast, for the ejection of ions from the surface, the incident and ejected particle energy and angle distributions suggest direct, large momentum-transfer processes. The scattered rare-gas atom distributions exhibit large energy loss, yet are strongly structured and surprisingly sensitive to surface topography.
UR - http://www.scopus.com/inward/record.url?scp=0346181255&partnerID=8YFLogxK
U2 - 10.1116/1.575069
DO - 10.1116/1.575069
M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???
AN - SCOPUS:0346181255
SN - 0734-2101
VL - 6
SP - 889
EP - 894
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 3
ER -