Holes generation in glass using large spot femtosecond laser pulses

Yuval Berg, Zvi Kotler, Yosi Shacham-Diamand

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrate high-throughput, symmetrical, holes generation in fused silica glass using a large spot size, femtosecond IR-laser irradiation which modifies the glass properties and yields an enhanced chemical etching rate. The process relies on a balanced interplay between the nonlinear Kerr effect and multiphoton absorption in the glass which translates into symmetrical glass modification and increased etching rate. The use of a large laser spot size makes it possible to process thick glasses at high speeds over a large area. We have demonstrated such fabricated holes with an aspect ratio of 1:10 in a 1 mm thick glass samples.

Original languageEnglish
Article number035009
JournalJournal of Micromechanics and Microengineering
Volume28
Issue number3
DOIs
StatePublished - 1 Feb 2018

Keywords

  • chemical etching
  • femtosecond laser
  • glass
  • interconnects
  • nonlinear effects

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