Abstract
High sensitivity, ring-type measurement devices based on acousto-optic and fiber-optic delay lines are described. Applications of these devices for linear and angular displacements with resolution of 0.1 μm and 1 μrad are shown. Methods of further improvement of the devices' characteristics are discussed.
| Original language | English |
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| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Pages | 454-462 |
| Number of pages | 9 |
| State | Published - 1995 |
| Event | 9th Meeting on Optical Engineering in Israel - Tel-Aviv, Isr Duration: 24 Oct 1994 → 26 Oct 1994 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
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| Volume | 2426 |
| ISSN (Print) | 0277-786X |
Conference
| Conference | 9th Meeting on Optical Engineering in Israel |
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| City | Tel-Aviv, Isr |
| Period | 24/10/94 → 26/10/94 |