HIGH RESOLUTION ADDITIVE THIN FILM PATTERNING.

Keyphrases

• High-resolution 100%
• Anisotropy 100%
• Thin Film Patterning 100%
• Sidewall 50%
• Etching Rate 50%
• Corrosion 50%
• Self-aligned 50%
• Lift-off 50%
• Hanging 50%
• Edge Detection 50%
• Dry Etching 50%
• Trench Isolation 50%
• VLSI Technology 50%
• Metalization 50%
• Device Dimensions 50%
• Wet Etching 50%
• Resist Profile 50%
• Patterning Technology 50%
• Additive Method 50%
• Etching Technology 50%
• Film Area 50%

Material Science

• Film 100%
• Thin Films 100%
• Anisotropy 50%
• Corrosion 25%
• Wet Etching 25%
• Dry Etching 25%