Halide chemical vapor deposition of 2D semiconducting atomically-thin crystals: From self-seeded to epitaxial growth

Engineering & Materials Science

• Epitaxial growth 100%
• Chemical vapor deposition 82%
• Crystals 70%
• Monolayers 70%
• Nucleation 55%
• Photoluminescence 28%
• Transition metals 26%
• Gate dielectrics 25%
• Heterojunctions 23%
• Field effect transistors 19%
• Carbon 13%

Chemistry

• Epitaxial Growth 86%
• Chemical Vapour Deposition 64%
• Halide 54%
• Nucleation 43%
• Vapor Deposition Process 43%
• Monolayer 40%
• Modification 19%
• Field Effect 17%
• Dielectric Material 15%
• Photoluminescence 13%
• Compound Mobility 13%
• Transition Element 12%
• Application 11%
• Reduction 8%
• Surface 5%