Grain boundary migration and grain growth induced by electromigration in copper and aluminum lines

A. Gladkikh*, E. Glickman, M. Karpovsky, Y. Lereah, A. Palevski, J. Shubert

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

The changes of microstructure in Al and Cu thin film lines due to electromigration have been studied using transmission electron microscopy. Grain boundary migration, inclination and dislocation activity were found to be critically involved in the electromigration induced hillock formation that can be described as three dimensional grain growth.

Original languageEnglish
Pages (from-to)283-288
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume391
DOIs
StatePublished - 1995
EventProceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA
Duration: 17 Apr 199521 Apr 1995

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