Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams

Keyphrases

• Flow Velocity 100%
• Sensing Approach 100%
• Microbeam 100%
• Flow Sensing 100%
• Air Stream 50%
• Structural Domains 50%
• Beam Type 50%
• Electric Current 50%
• Current Sensitivity 50%
• Thermoelectric 50%
• Thermal Stress 50%
• Joule Heating 50%
• Deflection 50%
• Thermoelectric Properties 50%
• Multicrystalline Silicon 50%
• Post-buckling 50%
• Critical Buckling 50%
• Wall Shear Stress Sensor 50%
• Velocity Shear 50%
• Thermofluidic 50%
• Deflection Monitoring 50%
• Quasi-static Response 50%
• Deflection Measurement 50%
• Deflection Sensitivity 50%

Engineering

• Flow Velocity 100%
• Experimental Result 50%
• Airstream 50%
• Wall Shear Stress 50%
• Thermal Stress 50%
• Silicon Single Crystal 50%
• Critical Buckling 50%
• Static Response 50%
• Structural Domain 50%
• Thermoelectricity 50%
• Resistance Heating 50%

Material Science

• Silicon 100%
• Thermoelectrics 100%
• Device Type 100%
• Thermal Stress 100%
• Single Crystal 100%