Femtosecond laser processing of ceria-based micro actuators

Keyphrases

• Actuation 50%
• Actuator 50%
• Bottom Contact 50%
• Carrier Frequency 50%
• Ceria-Based 100%
• Clean Process 50%
• Compatibility Issues 50%
• Contact Edge 50%
• Design Process 50%
• Design Rules 50%
• Doped Cerium Oxide 50%
• Double-clamped Beam 50%
• Electrical Endurance 50%
• Electrical Excitation 50%
• Electroactive 50%
• Electroactive Materials 50%
• Electromechanical Testing 50%
• Electrostriction Effect 50%
• Electrostrictive Material 50%
• Etching Process 100%
• Excitation Voltage 50%
• Femtosecond Laser 100%
• Femtosecond Laser Processing 100%
• Femtosecond Laser Texturing 50%
• Gadolinium Doped 50%
• In-plane Strain 50%
• K-cycle 50%
• Laser Ablation 50%
• Laser Microprocessing 50%
• Laser Patterning 50%
• Layer Edge 50%
• Lead-free 50%
• Lithography 50%
• Mechanical Degradation 50%
• Mechanical Endurance 50%
• MEMS Application 50%
• MEMS Devices 50%
• Metal Ablation 50%
• Metal Contact 50%
• Microactuators 100%
• Precise Patterning 50%
• Process Compatibility 50%
• Silicon Microfabrication 50%
• Technological Framework 50%
• Top Contact 100%
• Ultrashort Laser Pulses 50%
• Unique Properties 50%
• Voltage Amplitude 50%

Material Science

• Actuator 100%
• Cerium Oxide 100%
• Electrostriction 50%
• Gadolinium 50%
• Laser Ablation 50%
• Laser Processing 100%
• Laser Pulse 50%
• Lithography 50%
• Mechanical Degradation 50%
• Mechanical Testing 50%
• Microelectromechanical System 100%
• Microfabrication 50%
• Thin Films 50%

Engineering

• Actuation 25%
• Actuator 100%
• Carrier Frequency 25%
• Design Rule 25%
• Double-Clamped Beam 25%
• Etching Process 25%
• Femtosecond Laser 100%
• Laser Micro 25%
• Laser Patterning 50%
• Laser Processing 100%
• Lithography 25%
• Mechanical Degradation 25%
• Mechanical Testing 25%
• Metal Contact 25%
• Microelectromechanical System 50%
• Microfabrication 25%
• Observables 25%
• Plane Strain 25%
• Process Design 25%
• Proof-of-Concept 25%
• Short Pulse Laser 25%
• Thin Films 25%