Failure phenomena due to hydrogen migration in amorphous a-SiN_x:H films

Chemistry

• Amorphous Material 85%
• Nitride 79%
• Hydrogen 62%
• Liquid Film 59%
• Amorphous Silicon 55%
• Electron Correlation Energy 55%
• Nonequilibrium 44%

Engineering & Materials Science

• Silicon nitride 100%
• Hydrogen 98%
• Electron correlations 79%
• Amorphous silicon 56%
• Degradation 28%

Physics & Astronomy

• silicon nitrides 80%
• hydrogen 76%
• suggestion 40%
• amorphous silicon 37%
• leakage 34%
• trapping 31%
• degradation 31%
• electrons 17%
• energy 12%