Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkin; M. V. Rybin; K. B. Samusev; M. F. Limonov; R. V. Kiyan; B. N. Chichkov; Yu S. Kivshar; P. A. Belov

doi:10.1134/S0021364014090112

Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkin, M. V. Rybin^*, K. B. Samusev, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu S. Kivshar, P. A. Belov

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

Original language	English
Pages (from-to)	531-534
Number of pages	4
Journal	JETP Letters
Volume	99
Issue number	9
DOIs	https://doi.org/10.1134/S0021364014090112
State	Published - 2014
Externally published	Yes

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title = "Fabrication of submicron structures by three-dimensional laser lithography",

abstract = "As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.",

author = "Shishkin, {I. I.} and Rybin, {M. V.} and Samusev, {K. B.} and Limonov, {M. F.} and Kiyan, {R. V.} and Chichkov, {B. N.} and Kivshar, {Yu S.} and Belov, {P. A.}",

year = "2014",

doi = "10.1134/S0021364014090112",

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AU - Shishkin, I. I.

AU - Rybin, M. V.

AU - Samusev, K. B.

AU - Limonov, M. F.

AU - Kiyan, R. V.

AU - Chichkov, B. N.

AU - Kivshar, Yu S.

AU - Belov, P. A.

PY - 2014

Y1 - 2014

N2 - As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

AB - As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

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VL - 99

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JO - JETP Letters

JF - JETP Letters

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Fabrication of submicron structures by three-dimensional laser lithography

Abstract

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