Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkin, M. V. Rybin*, K. B. Samusev, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu S. Kivshar, P. A. Belov

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

Original languageEnglish
Pages (from-to)531-534
Number of pages4
JournalJETP Letters
Issue number9
StatePublished - 2014
Externally publishedYes


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