Fabrication of nanometer size photoresist wire patterns with a silver nanocrystal shadowmask

S. H. Choi*, K. L. Wang, M. S. Leung, G. W. Stupian, N. Presser, S. W. Chung, G. Markovich, S. H. Kim, J. R. Heath

*Corresponding author for this work

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Keyphrases

Engineering

Material Science