Fabrication and testing of highly efficient resonance domain diffractive optical elements

Keyphrases

• High Efficiency 100%
• Diffractive Optics 100%
• Resonance Domain 100%
• Diffraction Efficiency 66%
• Surface Relief 66%
• Hologram 33%
• Computer-generated Hologram 33%
• Subwavelength 33%
• Propagation Direction 33%
• Electron Beam 33%
• Wavefront Curvature 33%
• Laser Light 33%
• Spectral Selectivity 33%
• Spatially Variable 33%
• Light Propagation 33%
• AFM Measurements 33%
• Bragg Phenomenon 33%
• Diffractive Structures 33%
• Optical Surface 33%
• Groove Depth 33%
• Angular Selectivity 33%
• RIE Etching 33%
• 532 Nm Laser 33%
• SEM Measurements 33%
• Fused Silica Grating 33%

Engineering

• Optical Element 100%
• Holograms 66%
• Propagation Direction 33%
• Bragg Cell 33%
• Laser Light 33%
• Light Propagation 33%
• Enabling Technology 33%
• Groove Depth 33%
• Optical Surface 33%
• Fused Silica 33%

Material Science

• Surface (Surface Science) 100%
• Silicon Dioxide 33%
• Scanning Electron Microscopy 33%
• Reactive Ion Etching 33%