Fabrication and testing of highly efficient resonance domain diffractive optical elements

Omri Barlev*, Michael A. Golub, Asher A. Friesem, Diana Mahalu, Menachem Nathan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations


Structuring of optical surfaces with surface-relief diffractive optical elements is an enabling technology for achieving considerable spatially varying changes in light propagation direction and wavefront curvature. This way, Bragg effects, angular and spectral selectivity and nearly 100% diffraction efficiency usually attributed to volume optical holograms can be achieved by surface relief computer generated holograms and diffractive optical elements. Several methods for fabricating deep "resonance domain" diffraction structures with periods, exceeding the subwavelength limit but near to the wavelength, were compared and optimized. Results of direct e-beam writing RIE etching, SEM and AFM measurements for fused silica gratings with period of 520 nm and groove depth of 1000 nm, designed for nearly 100% diffraction efficiency in the green 532 nm laser light, are presented.

Original languageEnglish
Title of host publicationOptical Fabrication, Testing, and Metrology IV
StatePublished - 2011
EventOptical Fabrication, Testing, and Metrology IV - Marseille, France
Duration: 7 Sep 20118 Sep 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptical Fabrication, Testing, and Metrology IV


  • Bragg diffraction
  • Diffractive optics
  • computer generated holograms
  • diffraction efficiency
  • hybrid refractive and diffractive optics
  • optical fabrication
  • resonance domains


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