Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration

I. I. Beilis, Y. Koulik, R. L. Boxman

Research output: Contribution to journalArticlepeer-review

Abstract

The plasma plume extracted from a shower anode of a vacuum arc with a black-body assembly (VABBA) was imaged in various development stages. In the VABBA, cathode erosion products fill a closed chamber formed by the cathode and a refractory anode. The anode is heated by the arc and reevaporates any cathode material incident upon it. An expanding metallic plasma plume is extracted through small apertures in the shower anode. The plasma plume was utilized to deposit a Cu thin film on a relatively large substrate.

Original languageEnglish
Article number5937052
Pages (from-to)2838-2839
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume39
Issue number11 PART 1
DOIs
StatePublished - Nov 2011

Keywords

  • Vacuum arc
  • black body
  • electrode assembly
  • metallic plasma source
  • plasma images
  • refractory anode
  • shower anode

Fingerprint

Dive into the research topics of 'Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration'. Together they form a unique fingerprint.

Cite this