Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration

I. I. Beilis; Y. Koulik; R. L. Boxman

doi:10.1109/TPS.2011.2159399

Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration

I. I. Beilis^*, Y. Koulik, R. L. Boxman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

The plasma plume extracted from a shower anode of a vacuum arc with a black-body assembly (VABBA) was imaged in various development stages. In the VABBA, cathode erosion products fill a closed chamber formed by the cathode and a refractory anode. The anode is heated by the arc and reevaporates any cathode material incident upon it. An expanding metallic plasma plume is extracted through small apertures in the shower anode. The plasma plume was utilized to deposit a Cu thin film on a relatively large substrate.

Original language	English
Article number	5937052
Pages (from-to)	2838-2839
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	39
Issue number	11 PART 1
DOIs	https://doi.org/10.1109/TPS.2011.2159399
State	Published - Nov 2011

Keywords

Vacuum arc
black body
electrode assembly
metallic plasma source
plasma images
refractory anode
shower anode

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10.1109/TPS.2011.2159399

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title = "Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration",

abstract = "The plasma plume extracted from a shower anode of a vacuum arc with a black-body assembly (VABBA) was imaged in various development stages. In the VABBA, cathode erosion products fill a closed chamber formed by the cathode and a refractory anode. The anode is heated by the arc and reevaporates any cathode material incident upon it. An expanding metallic plasma plume is extracted through small apertures in the shower anode. The plasma plume was utilized to deposit a Cu thin film on a relatively large substrate.",

keywords = "Vacuum arc, black body, electrode assembly, metallic plasma source, plasma images, refractory anode, shower anode",

author = "Beilis, {I. I.} and Y. Koulik and Boxman, {R. L.}",

note = "Funding Information: Manuscript received November 25, 2010; revised May 31, 2011; accepted May 31, 2011. Date of publication July 5, 2011; date of current version November 9, 2011. This work was supported by the Israel Science Foundation. The authors are with the Iby and Aladar Fleischman Faculty of Engineering, School of Electrical Engineering, Tel Aviv University, Tel Aviv 69978, Israel. Digital Object Identifier 10.1109/TPS.2011.2159399",

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doi = "10.1109/TPS.2011.2159399",

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KW - Vacuum arc

KW - black body

KW - electrode assembly

KW - metallic plasma source

KW - plasma images

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Evolution of a plasma plume from a shower anode in a vacuum arc with a black-body electrode configuration

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