Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects

Stanislav Stepanov; Shlomo Ruschin

doi:10.1109/OIC.2012.6224432

Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects

Stanislav Stepanov^*, Shlomo Ruschin

^*Corresponding author for this work

School of Electrical Engineering

Tel Aviv University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Embedded optical channel waveguides in silicon were realized. The fabrication includes passivation of the inner walls and core filling by a transparent polymer. The waveguides are proposed as data busses beneath Si-based circuitry.

Original language	English
Title of host publication	2012 Optical Interconnects Conference, OIC 2012
Pages	90-91
Number of pages	2
DOIs	https://doi.org/10.1109/OIC.2012.6224432
State	Published - 2012
Event	2012 Optical Interconnects Conference, OIC 2012 - Santa Fe, NM, United States Duration: 20 May 2012 → 23 May 2012

Publication series

Name	2012 Optical Interconnects Conference, OIC 2012

Conference

Conference	2012 Optical Interconnects Conference, OIC 2012
Country/Territory	United States
City	Santa Fe, NM
Period	20/05/12 → 23/05/12

Access to Document

10.1109/OIC.2012.6224432

Cite this

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title = "Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects",

abstract = "Embedded optical channel waveguides in silicon were realized. The fabrication includes passivation of the inner walls and core filling by a transparent polymer. The waveguides are proposed as data busses beneath Si-based circuitry.",

author = "Stanislav Stepanov and Shlomo Ruschin",

year = "2012",

doi = "10.1109/OIC.2012.6224432",

language = "אנגלית",

isbn = "9781457716201",

series = "2012 Optical Interconnects Conference, OIC 2012",

pages = "90--91",

booktitle = "2012 Optical Interconnects Conference, OIC 2012",

note = "2012 Optical Interconnects Conference, OIC 2012 ; Conference date: 20-05-2012 Through 23-05-2012",

}

Stepanov, S & Ruschin, S 2012, Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects. in 2012 Optical Interconnects Conference, OIC 2012., 6224432, 2012 Optical Interconnects Conference, OIC 2012, pp. 90-91, 2012 Optical Interconnects Conference, OIC 2012, Santa Fe, NM, United States, 20/05/12. https://doi.org/10.1109/OIC.2012.6224432

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AU - Stepanov, Stanislav

AU - Ruschin, Shlomo

PY - 2012

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AB - Embedded optical channel waveguides in silicon were realized. The fabrication includes passivation of the inner walls and core filling by a transparent polymer. The waveguides are proposed as data busses beneath Si-based circuitry.

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T2 - 2012 Optical Interconnects Conference, OIC 2012

Y2 - 20 May 2012 through 23 May 2012

ER -

Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects

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