Embedded metal microstructures in glass substrates by a combined laser trenching and printing process

Yuval Berg, Shoshana Winter, Zvi Kotler, Yosi Shacham-Diamand

Research output: Contribution to journalArticlepeer-review

Abstract

Control of grooved structured profiles can be achieved by a femtosecond laser ablation process in different materials - dielectrics, semi-conductors and metals. In addition, high accuracy additive manufacturing techniques, e.g. laser induced forward transfer (LIFT), provide flexibility in 3D printed structures deposited on a variety of substrates. The combination of those two laser technologies allows the integration of embedded circuitry and other components, such as microfluidic and micromechanical systems, paving the way to a wide range of applications where conventional subtractive patterning is a problem. Embedding is advantageous in terms of mechanical stability and adherence of the printed metal allowing a favorable aspect ratio and thereby providing improved electrical properties of the conducting lines as well as planar and debrisfree surfaces. In this work we report on a combination of laser grooving and laser printing processes and demonstrate the manufacturing of buried copper structures in a grooved borosilicate glass substrate.

Original languageEnglish
Pages (from-to)131-134
Number of pages4
JournalJournal of Laser Micro Nanoengineering
Volume13
Issue number2
DOIs
StatePublished - 1 Sep 2018

Keywords

  • Femtosecond lasers
  • Glass patterning
  • Interconnects
  • Interposers
  • Laser induced forward transfer
  • Microelectronics

Fingerprint

Dive into the research topics of 'Embedded metal microstructures in glass substrates by a combined laser trenching and printing process'. Together they form a unique fingerprint.

Cite this