Elevated-Temperature STM Study of Ge and Si Growth on Si(001) From GeH4 and Si2H6

J. H. G. Owen, K. Miki, D. Bowler, G. A. D. Briggs, I. Goldfarb

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

In this study we have investigated the mechanism of Si and Ge growth from gaseous precursors, at intermediate temperatures, in elevated-temperature scanning tunnelling microscope (STM). Based on our observations, we suggest a plausible mechanism for the growth of Ge and Si from GeH4 and Si2H6.
Original languageAmerican English
Title of host publicationSurface Diffusion: Atomistic and Collective Processes
EditorsM. C. Tringides
Place of PublicationBoston, MA
PublisherSpringer US
Pages245-252
Number of pages8
ISBN (Print)978-1-4899-0262-7
DOIs
StatePublished - 1997
Externally publishedYes

Publication series

NameNATO ASI Series
Name
Volume360

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