Electrostatically Actuated SOI In-Plane Motion Platform for In-Situ Calibration of Micro Gyroscopes

Erez Benjamin, Ronen Maimon, Aviv Ronen, Eldad Yichie, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on the design, fabrication and experimental functionality demonstration of a robust and manufacturable, in-plane moving rotational platform for micro gyroscope scale factor calibration. The ring-shaped 7.5 mm in diameter stage is fabricated from a 150 $\mu \mathrm{m}$ thick device layer of a silicon on insulator (SOI) substrate, using an established process. Electrostatic actuation by a rotary comb drive induces in-plane vibratory rotation of the platform, with the amplitude of 0.5° and frequencies up to 100 Hz. The rate measured by an off-the-shelf gyro module mounted on the platform was in a good agreement with the directly measured stage rate detected optically.

Original languageEnglish
Title of host publication2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350303872
DOIs
StatePublished - 2023
Event2023 IEEE SENSORS, SENSORS 2023 - Vienna, Austria
Duration: 29 Oct 20231 Nov 2023

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference2023 IEEE SENSORS, SENSORS 2023
Country/TerritoryAustria
CityVienna
Period29/10/231/11/23

Keywords

  • MEMS
  • SOI
  • electrostatic actuation
  • micro gyro
  • rotational stage
  • scale factor in-situ calibration

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