Abstract
Surfaces of KCl and NaCl have been subjected to electron bombardment and the emitted species have been monitored by mass spectrometry as functions of substrate temperature and electron beam intensity. In addition to neutrals, electron-induced sputtering of positive ions and clusters is reported for the first time. Experimental evidence shows that they are formed in the surface layer during the electron bombardment. An attempt is made to explain the energy transfer mechanism by the Auger decay model. The possibility of secondary sputtering by ions or neutrals is discussed and this effect is proposed to explain the particular sputtering pattern encountered in the studied alkali halides.
Original language | English |
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Article number | 019 |
Pages (from-to) | 4763-4768 |
Number of pages | 6 |
Journal | Journal of Physics C: Solid State Physics |
Volume | 15 |
Issue number | 22 |
DOIs | |
State | Published - 1982 |