Electron beam induced dissociation and conductivity of SnO2 films

Yoram Shapira

doi:10.1063/1.329506

Electron beam induced dissociation and conductivity of SnO₂ films

Yoram Shapira^*

^*Corresponding author for this work

Department of Electrical Engineering - Physical Eng.

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The effect of electron bombardment on rf-sputtered SnO₂ films was studied using mass spectrometry, Auger electron spectroscopy, and conductivity measurements. The studies show that the electron beam causes surface dissociation and subsequent desorption of atomic oxygen. The dissociation is accompanied by corresponding increase of film conductivity, which persists in ultrahigh vacuum conditions and can eliminated by O ₂ introduction. A model of the correlated processes is suggested.

Original language	English
Pages (from-to)	5696-5698
Number of pages	3
Journal	Journal of Applied Physics
Volume	52
Issue number	9
DOIs	https://doi.org/10.1063/1.329506
State	Published - 1981

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abstract = "The effect of electron bombardment on rf-sputtered SnO2 films was studied using mass spectrometry, Auger electron spectroscopy, and conductivity measurements. The studies show that the electron beam causes surface dissociation and subsequent desorption of atomic oxygen. The dissociation is accompanied by corresponding increase of film conductivity, which persists in ultrahigh vacuum conditions and can eliminated by O 2 introduction. A model of the correlated processes is suggested.",

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AB - The effect of electron bombardment on rf-sputtered SnO2 films was studied using mass spectrometry, Auger electron spectroscopy, and conductivity measurements. The studies show that the electron beam causes surface dissociation and subsequent desorption of atomic oxygen. The dissociation is accompanied by corresponding increase of film conductivity, which persists in ultrahigh vacuum conditions and can eliminated by O 2 introduction. A model of the correlated processes is suggested.

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Electron beam induced dissociation and conductivity of SnO₂ films

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