Electroless deposition of silver thin films on gold nanoparticles catalyst for micro and nanoelectronics applications

A. Inberg, P. Livshits*, Z. Zalevsky, Y. Shacham-Diamand

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, the electroless deposition (ELD) of silver (Ag) thin films onto SiO 2/Si surface modified by self-assembled monolayer (SAM) and activated by gold nanoparticles (AuNPs) has been studied. Experimental results clearly indicate the successful deposition of the films. Three distinct stages, such as compact and isolated islands, coalesce equilibrium shapes, and continuous hole-free films, during the growth of the Ag films, were observed by HRSEM imaging. Optical and electrical properties of the films were investigated, and their dependence on the coating structure was discussed. The application of small AuNPs as catalyst for successful metallization is proposed.

Original languageEnglish
Pages (from-to)570-573
Number of pages4
JournalMicroelectronic Engineering
Volume98
DOIs
StatePublished - Oct 2012

Keywords

  • Electroless deposition
  • Gold nanoparticles catalyst
  • Silver ultra-thin films

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