Electroless Cu for VLSI

James S.H. Cho; Ho KYu Kang; S. Simon; W. Wong; Yosi Shacham-Diamand

doi:10.1557/S0883769400047308

Electroless Cu for VLSI

James S.H. Cho
, Ho KYu Kang
, S. Simon
, W. Wong
, Yosi Shacham-Diamand

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Original language	English
Pages (from-to)	31-38
Number of pages	8
Journal	MRS Bulletin
Volume	18
Issue number	6
DOIs	https://doi.org/10.1557/S0883769400047308
State	Published - Jun 1993

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title = "Electroless Cu for VLSI",

author = "Cho, \{James S.H.\} and Kang, \{Ho KYu\} and S. Simon and W. Wong and Yosi Shacham-Diamand",

year = "1993",

month = jun,

doi = "10.1557/S0883769400047308",

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volume = "18",

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AU - Cho, James S.H.

AU - Kang, Ho KYu

AU - Simon, S.

AU - Wong, W.

AU - Shacham-Diamand, Yosi

PY - 1993/6

Y1 - 1993/6

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VL - 18

SP - 31

EP - 38

JO - MRS Bulletin

JF - MRS Bulletin

IS - 6

ER -

Electroless Cu for VLSI

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