Electroless Cu for VLSI

James S.H. Cho, Ho KYu Kang, S. Simon, W. Wong, Yosi Shacham-Diamand

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@article{d436723f934d4de2ac9bd124a8a8e3e2,

title = "Electroless Cu for VLSI",

author = "Cho, {James S.H.} and Kang, {Ho KYu} and S. Simon and W. Wong and Yosi Shacham-Diamand",

year = "1993",

month = jun,

doi = "10.1557/S0883769400047308",

language = "אנגלית",

volume = "18",

pages = "31--38",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Cambridge University Press",

number = "6",

}

TY - JOUR

T1 - Electroless Cu for VLSI

AU - Cho, James S.H.

AU - Kang, Ho KYu

AU - Simon, S.

AU - Wong, W.

AU - Shacham-Diamand, Yosi

PY - 1993/6

Y1 - 1993/6

UR - http://www.scopus.com/inward/record.url?scp=84971193997&partnerID=8YFLogxK

U2 - 10.1557/S0883769400047308

DO - 10.1557/S0883769400047308

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:84971193997

SN - 0883-7694

VL - 18

SP - 31

EP - 38

JO - MRS Bulletin

JF - MRS Bulletin

IS - 6

ER -