Electroless barrier and seed layers for on-chip metallization

Valery M. Dubin, Sergey Lopatin, Amit Kohn, Nick Petrov, Moshe Eizenberg, Yosi Shacham-Diamand

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationMicroelectronic packaging
EditorsM. Datta, Tetsuya Osaka, J. Walter Schultze
Place of PublicationBoca Raton, FL
PublisherCRC Press
Chapter3
Pages65-110
Number of pages46
ISBN (Print)041531190X, 9780415311908
StatePublished - 20 Dec 2004

Publication series

NameNew trends in electrochemical technology
Volume3
ISSN (Print)1028-5342

Keywords

  • Microélectronique
  • Mise sous boîtier (microélectronique)
  • Emballage
  • Microelectronic packaging

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