Electrochemical micro technologies for polymeric MEMS and biochip applications

R. Ofek Almog*, Y. Sverdlov, N. Fishelson, T. Shmilovich, E. Rabinovich, Y. Shacham-Diamand

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Flexible electrode chips were fabricated on polymer substrates, either SU-8 (epoxy-based photo-definable polymer) or PDMS (Polydimethylsiloxane, elastomer-base polymer), using a photolithography process. In one case, Ppy (Polypyrrole, a conductive polymer) was deposited on the electrodes' gold seed layer. In another case, Ppy was deposited on the micro actuator's copper seed layer, both cases by electropolymerization using cyclic voltammetry. Thus, we developed a process for a flexible electrode that integrates a polymer substrate and a conductive polymer. The polypyrrole is reinforcing the gold and copper wires and electrically shunting the interconnects, increasing thereby the device durability and reliability.

Original languageEnglish
Title of host publicationOrganic and Biological Electrochemistry Posters (General) - 216th ECS Meeting
PublisherElectrochemical Society Inc.
Number of pages5
ISBN (Electronic)9781566777834
ISBN (Print)9781566777834
StatePublished - 2009

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


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