Electrochemical micro technologies for polymeric MEMS and biochip applications

R. Ofek Almog; Y. Sverdlov; N. Fishelson; T. Shmilovich; E. Rabinovich; Y. Shacham-Diamand

doi:10.1149/1.3300058

Electrochemical micro technologies for polymeric MEMS and biochip applications

R. Ofek Almog^*, Y. Sverdlov, N. Fishelson, T. Shmilovich, E. Rabinovich, Y. Shacham-Diamand

^*Corresponding author for this work

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Flexible electrode chips were fabricated on polymer substrates, either SU-8 (epoxy-based photo-definable polymer) or PDMS (Polydimethylsiloxane, elastomer-base polymer), using a photolithography process. In one case, Ppy (Polypyrrole, a conductive polymer) was deposited on the electrodes' gold seed layer. In another case, Ppy was deposited on the micro actuator's copper seed layer, both cases by electropolymerization using cyclic voltammetry. Thus, we developed a process for a flexible electrode that integrates a polymer substrate and a conductive polymer. The polypyrrole is reinforcing the gold and copper wires and electrically shunting the interconnects, increasing thereby the device durability and reliability.

Original language	English
Title of host publication	Organic and Biological Electrochemistry Posters (General) - 216th ECS Meeting
Publisher	Electrochemical Society Inc.
Pages	17-21
Number of pages	5
Edition	16
ISBN (Electronic)	9781566777834
ISBN (Print)	9781566777834
DOIs	https://doi.org/10.1149/1.3300058
State	Published - 2009

Publication series

Name	ECS Transactions
Number	16
Volume	25
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

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Ofek Almog, R., Sverdlov, Y., Fishelson, N., Shmilovich, T., Rabinovich, E., & Shacham-Diamand, Y. (2009). Electrochemical micro technologies for polymeric MEMS and biochip applications. In Organic and Biological Electrochemistry Posters (General) - 216th ECS Meeting (16 ed., pp. 17-21). (ECS Transactions; Vol. 25, No. 16). Electrochemical Society Inc.. https://doi.org/10.1149/1.3300058

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title = "Electrochemical micro technologies for polymeric MEMS and biochip applications",

abstract = "Flexible electrode chips were fabricated on polymer substrates, either SU-8 (epoxy-based photo-definable polymer) or PDMS (Polydimethylsiloxane, elastomer-base polymer), using a photolithography process. In one case, Ppy (Polypyrrole, a conductive polymer) was deposited on the electrodes' gold seed layer. In another case, Ppy was deposited on the micro actuator's copper seed layer, both cases by electropolymerization using cyclic voltammetry. Thus, we developed a process for a flexible electrode that integrates a polymer substrate and a conductive polymer. The polypyrrole is reinforcing the gold and copper wires and electrically shunting the interconnects, increasing thereby the device durability and reliability.",

author = "{Ofek Almog}, R. and Y. Sverdlov and N. Fishelson and T. Shmilovich and E. Rabinovich and Y. Shacham-Diamand",

year = "2009",

doi = "10.1149/1.3300058",

language = "אנגלית",

isbn = "9781566777834",

series = "ECS Transactions",

publisher = "Electrochemical Society Inc.",

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Ofek Almog, R, Sverdlov, Y, Fishelson, N, Shmilovich, T, Rabinovich, E & Shacham-Diamand, Y 2009, Electrochemical micro technologies for polymeric MEMS and biochip applications. in Organic and Biological Electrochemistry Posters (General) - 216th ECS Meeting. 16 edn, ECS Transactions, no. 16, vol. 25, Electrochemical Society Inc., pp. 17-21. https://doi.org/10.1149/1.3300058

Electrochemical micro technologies for polymeric MEMS and biochip applications. / Ofek Almog, R.; Sverdlov, Y.; Fishelson, N. et al.
Organic and Biological Electrochemistry Posters (General) - 216th ECS Meeting. 16. ed. Electrochemical Society Inc., 2009. p. 17-21 (ECS Transactions; Vol. 25, No. 16).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Electrochemical micro technologies for polymeric MEMS and biochip applications

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AU - Sverdlov, Y.

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AB - Flexible electrode chips were fabricated on polymer substrates, either SU-8 (epoxy-based photo-definable polymer) or PDMS (Polydimethylsiloxane, elastomer-base polymer), using a photolithography process. In one case, Ppy (Polypyrrole, a conductive polymer) was deposited on the electrodes' gold seed layer. In another case, Ppy was deposited on the micro actuator's copper seed layer, both cases by electropolymerization using cyclic voltammetry. Thus, we developed a process for a flexible electrode that integrates a polymer substrate and a conductive polymer. The polypyrrole is reinforcing the gold and copper wires and electrically shunting the interconnects, increasing thereby the device durability and reliability.

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Electrochemical micro technologies for polymeric MEMS and biochip applications

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