Electrical properties of Sb implanted Si_1-xGe_x alloy layers

Keyphrases

• Electrical Properties 100%
• Si1-xGex Alloy 100%
• Alloy Layer 100%
• Activation Efficiency 100%
• Room Temperature 50%
• Secondary Ion Mass Spectrometry 50%
• High Dose 50%
• Implantation Profile 50%
• Annealing 50%
• Si Substrate 50%
• Maximal Value 50%
• P-type 50%
• Epilayer 50%
• Amorphization 50%
• Electrical Activity 50%
• Spreading Resistance Profiling 50%
• High Temperature Anneal 50%
• Profile Measurement 50%

Material Science

• Secondary Ion Mass Spectrometry 100%
• Molecular Beam Epitaxy 100%
• Amorphization 100%
• Epilayers 100%