Effective cathode voltage and ion current measurements in a Vacuum Arc with a Black Body Electrode Configuration

I. I. Beilis, Y. Koulik, R. L. Boxman

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new type of Vacuum Arc with a Black Body Assembly (VABBA) was studied to produce a directed plasma flux. The arc was contained in a closed cathode-anode assembly which confined and evaporated macroparticles (MPs) while the plasma was extracted through small anode apertures. Arc currents were I=175-250 A and arc time 90 s. The effective cathode voltage Ucef was determined by calorimetrically using a thermocouple probe. The ion current Ii was measured by an electrical probe. It was observed that Ucef increased with time from ∼6.5 V for cold anodes (i.e for a conventional cathodic arc) to a steady state value of ∼11.2-11.7 V when the anode was sufficiently hot and the arc operated in the VABBA mode. Ii decreased with distance from the anode. The expanding Cu plasma flux from a VABBA with a shower-head anode produced thin films on glass substrates with a deposition rate of 3μm/min.

Original languageEnglish
Title of host publication25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012
Pages325-328
Number of pages4
DOIs
StatePublished - 2012
Event25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 - Tomsk, Russian Federation
Duration: 2 Sep 20127 Sep 2012

Publication series

NameProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
ISSN (Print)1093-2941

Conference

Conference25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012
Country/TerritoryRussian Federation
CityTomsk
Period2/09/127/09/12

Fingerprint

Dive into the research topics of 'Effective cathode voltage and ion current measurements in a Vacuum Arc with a Black Body Electrode Configuration'. Together they form a unique fingerprint.

Cite this