Abstract
We present a new waveguided-sensing configuration combining the advantages of two effects, namely, two-wave interference and multiple-wave interference in a single sensing device. The sensor is accessed vertically from above by means of a three-port grating, and its readout can be accomplished both in an up-reflective or waveguided mode. The superposition of the two outcoming signals results in a variety of transmission characteristic curves depending on fabrication parameters, which are optimized in order to attain enhanced sensitivity. The sensor analyzed by means of a simple scattering matrix model and confirmed by full FDTD simulations.
Original language | English |
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Article number | 9171905 |
Pages (from-to) | 1478-1484 |
Number of pages | 7 |
Journal | IEEE Sensors Journal |
Volume | 21 |
Issue number | 2 |
DOIs | |
State | Published - 15 Jan 2021 |
Keywords
- Grating couplers
- interferometry
- optical sensors
- vertical coupling
- waveguides