TY - JOUR
T1 - Dissociative chemisorption of O2 inducing stress corrosion cracking in silicon crystals
AU - Gleizer, Anna
AU - Peralta, Giovanni
AU - Kermode, James R.
AU - De Vita, Alessandro
AU - Sherman, Dov
PY - 2014/3/18
Y1 - 2014/3/18
N2 - Fracture experiments to evaluate the cleavage energy of the (110)[1 1̄ 0] and (111)[1 1 2̄] cleavage systems in silicon at room temperature and humidity give 2.7±0.3 and 2.2±0.2 J/m2, respectively, lower than any previous measurement and inconsistent with density functional theory (DFT) surface energy calculations of 3.46 and 2.88 J/m2. However, in an inert gas environment, we measure values of 3.5±0.2 and 2.9±0.2 J/m2, consistent with DFT, that suggest a previously undetected stress corrosion cracking scenario for Si crack initiation in room conditions. This is fully confirmed by hybrid quantum-mechanics-molecular-mechanics calculations.
AB - Fracture experiments to evaluate the cleavage energy of the (110)[1 1̄ 0] and (111)[1 1 2̄] cleavage systems in silicon at room temperature and humidity give 2.7±0.3 and 2.2±0.2 J/m2, respectively, lower than any previous measurement and inconsistent with density functional theory (DFT) surface energy calculations of 3.46 and 2.88 J/m2. However, in an inert gas environment, we measure values of 3.5±0.2 and 2.9±0.2 J/m2, consistent with DFT, that suggest a previously undetected stress corrosion cracking scenario for Si crack initiation in room conditions. This is fully confirmed by hybrid quantum-mechanics-molecular-mechanics calculations.
UR - http://www.scopus.com/inward/record.url?scp=84897877765&partnerID=8YFLogxK
U2 - 10.1103/PhysRevLett.112.115501
DO - 10.1103/PhysRevLett.112.115501
M3 - מאמר
AN - SCOPUS:84897877765
VL - 112
JO - Physical Review Letters
JF - Physical Review Letters
SN - 0031-9007
IS - 11
M1 - 115501
ER -