Direct bonding of ferroelectrics

G. Rosenman, I. Torchinsky

Research output: Contribution to journalConference articlepeer-review

Abstract

A method for modifying the surface free energy of lithium tantalate ferroelectric crystals is reported. Ultraviolet illumination and low-energy electron irradiation have been used for tuning the surface free energy resulting in a wide range of wettability contact angles. The UV illumination makes the crystal polar face superhydrophilic while the electron irradiation strongly decreases the surface wetting. Basic thermodynamic approaches such as Zisman, Owens-Wendt, and Van Oss-Chaudhury-Good have been applied to calculations of elementary interactions responsible for bonding of solids. Fabrication of various wetting configurations allows to demonstrate high quality direct bonding of lithium tantalate plates with hydrophilic polar faces.

Original languageEnglish
Pages (from-to)51-68
Number of pages18
JournalFerroelectrics
Volume373
Issue number1 PART 1
DOIs
StatePublished - 2008
Event2nd International Symposium on Micro- and Nano-Scale Domain Structuring in Ferroelectrics, ISDS'07 - Ekaterinburg, Russian Federation
Duration: 22 Aug 200726 Aug 2007

Keywords

  • Contact angle
  • Direct bonding
  • Ferroelectrics
  • Lithium tantalate
  • Surface free energy
  • Wettability

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