Determining the profile of textured membranes by the alpha particle energy loss method

C. Kaiser, Y. Levy, T. Tiedje, Jeff F. Young, I. Kelson

Research output: Contribution to journalArticlepeer-review

Abstract

Alpha particle energy loss (AEL) spectroscopy was used to characterize a 5 μm pitch grating of silicon bars on a silicon dioxide membrane. Comparison of the data with simulated spectra shows that the angle of nonvertical grating sidewalls are readily quantified by AEL. The potential of AEL for distinguishing undercut and overcut etch profiles is assessed.

Original languageEnglish
Pages (from-to)2607-2609
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number14
DOIs
StatePublished - 8 Apr 2002

Fingerprint

Dive into the research topics of 'Determining the profile of textured membranes by the alpha particle energy loss method'. Together they form a unique fingerprint.

Cite this