Design Methodology and Model Order Reduction for Resonant Accelerometers

Omer Halevy, Slava Krylov

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.

Original languageEnglish
Title of host publicationINERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665402828
DOIs
StatePublished - 2022
Event9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022 - Avignon, France
Duration: 8 May 202211 May 2022

Publication series

NameINERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022
Country/TerritoryFrance
CityAvignon
Period8/05/2211/05/22

Keywords

  • compliant mechanism
  • reduced order modeling
  • resonant accelerometer
  • structural coupling
  • time-domain analysis

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