TY - GEN
T1 - Design Methodology and Model Order Reduction for Resonant Accelerometers
AU - Halevy, Omer
AU - Krylov, Slava
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.
AB - We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.
KW - compliant mechanism
KW - reduced order modeling
KW - resonant accelerometer
KW - structural coupling
KW - time-domain analysis
UR - http://www.scopus.com/inward/record.url?scp=85133248017&partnerID=8YFLogxK
U2 - 10.1109/INERTIAL53425.2022.9787741
DO - 10.1109/INERTIAL53425.2022.9787741
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AN - SCOPUS:85133248017
T3 - INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 9th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2022
Y2 - 8 May 2022 through 11 May 2022
ER -