Design considerations of a large-displacement multistable micro actuator with serially connected bistable elements

Keyphrases

• Multistable 100%
• Design Considerations 100%
• Large Displacement 100%
• Microactuators 100%
• Bi-stable Element 100%
• Snap-through 66%
• Stable Displacement 66%
• Actuator 33%
• Design Methodology 33%
• Model Prediction 33%
• Finite Element Modeling 33%
• Deep Reactive Ion Etching 33%
• Low Voltage 33%
• Stable Configuration 33%
• Design Parameters 33%
• Design Evaluation 33%
• Geometric Parameters 33%
• Stability Limit 33%
• Flexure 33%
• Nonlinear Finite Element Analysis 33%
• Modeling Methodology 33%
• Actuation Voltage 33%
• Arch Form 33%
• Silicon-on-insulator Wafer 33%
• Comb-drive Actuator 33%
• Logic Element 33%
• Variable Optical Attenuator 33%
• Nanomechanics 33%
• Shaped Beam 33%
• Inertial Sensors 33%
• Snapback 33%
• Sensor Variable 33%
• Electrostatic Comb Drive 33%
• Finite Element Design 33%
• Actuation Force 33%
• Lateral Stability 33%
• Shallow Arch 33%

Engineering

• Design Consideration 100%
• Bistables 100%
• Experimental Result 66%
• Snap-Through 66%
• Electrostatics 33%
• Actuation 33%
• Finite Element Modeling 33%
• Shallower 33%
• Finite Element Method 33%
• Transducer 33%
• Deep Reactive Ion Etching 33%
• Model Prediction 33%
• Design Parameter 33%
• Buckling 33%
• Flexure 33%
• Silicon on Insulator 33%
• Comb Drive Actuator 33%
• Inertial Sensor 33%
• Lateral Stability 33%
• Actuation Force 33%

Material Science

• Actuator 100%
• Snap-Through 50%
• Silicon 25%
• Finite Element Modeling 25%
• Finite Element Method 25%
• Reactive Ion Etching 25%