Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing

Keyphrases

• Accelerometer 100%
• Optical Sensing 100%
• Noise Equivalent Acceleration 100%
• Photodiode 50%
• Mechanical Structure 25%
• Readout Electronics 25%
• Mechanical Behavior 25%
• Cantilever 25%
• Noise Source 25%
• Novel Design 25%
• CMOS chip 25%
• Proof Mass 25%
• Bulk Micromachining 25%
• Micromachined Accelerometer 25%
• Natural Frequency 25%
• Maximum Acceleration 25%
• Electrical Behavior 25%
• Optical Behavior 25%

Engineering

• Photodiode 100%
• Micro Machining 50%
• Optimal Design 50%
• Mechanical Structure 50%
• Open Loop 50%
• Noise Source 50%
• Proof Mass 50%
• Resonant Frequency 50%