TY - JOUR
T1 - Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing
AU - Bochobza-Degani, Ofir
AU - Seter, Dan J.
AU - Socher, Eran
AU - Nemirovsky, Yael
N1 - Funding Information:
This research is supported by the Israeli Ministry of Science. The help of A. Shai and Y. Leivovich in the preparation of the samples is acknowledged.
PY - 2000/8/1
Y1 - 2000/8/1
N2 - A novel design of an open loop micromachined accelerometer is presented. The mechanical structure of the accelerometer is fabricated using bulk micromachining, which is then attached to a CMOS chip containing photodiodes and their readout electronics. The photodiodes are used to sense the movements of the proof-mass due to acceleration. Modeling of the accelerometer including the mechanical, electrical and optical behavior of the sensor as well as analysis of all its noise sources is described. A general expression for the noise equivalent acceleration (NEA) of the sensor is derived. A cantilever suspended accelerometer is presented as a case study, its NEA is derived and its optimal design with respect to the NEA is discussed. Finally, the fabrication and characterization of a first prototype are presented. The prototype shows a NEA of about 85 μg/ √Hz, a natural frequency of about 1.2 kHz and a maximum acceleration > 5 g.
AB - A novel design of an open loop micromachined accelerometer is presented. The mechanical structure of the accelerometer is fabricated using bulk micromachining, which is then attached to a CMOS chip containing photodiodes and their readout electronics. The photodiodes are used to sense the movements of the proof-mass due to acceleration. Modeling of the accelerometer including the mechanical, electrical and optical behavior of the sensor as well as analysis of all its noise sources is described. A general expression for the noise equivalent acceleration (NEA) of the sensor is derived. A cantilever suspended accelerometer is presented as a case study, its NEA is derived and its optimal design with respect to the NEA is discussed. Finally, the fabrication and characterization of a first prototype are presented. The prototype shows a NEA of about 85 μg/ √Hz, a natural frequency of about 1.2 kHz and a maximum acceleration > 5 g.
UR - http://www.scopus.com/inward/record.url?scp=0034249305&partnerID=8YFLogxK
U2 - 10.1016/S0924-4247(99)00357-X
DO - 10.1016/S0924-4247(99)00357-X
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AN - SCOPUS:0034249305
SN - 0924-4247
VL - 84
SP - 53
EP - 64
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1
ER -
