Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing

Ofir Bochobza-Degani, Dan J. Seter, Eran Socher, Yael Nemirovsky

Research output: Contribution to journalArticlepeer-review

Abstract

A novel design of an open loop micromachined accelerometer is presented. The mechanical structure of the accelerometer is fabricated using bulk micromachining, which is then attached to a CMOS chip containing photodiodes and their readout electronics. The photodiodes are used to sense the movements of the proof-mass due to acceleration. Modeling of the accelerometer including the mechanical, electrical and optical behavior of the sensor as well as analysis of all its noise sources is described. A general expression for the noise equivalent acceleration (NEA) of the sensor is derived. A cantilever suspended accelerometer is presented as a case study, its NEA is derived and its optimal design with respect to the NEA is discussed. Finally, the fabrication and characterization of a first prototype are presented. The prototype shows a NEA of about 85 μg/ √Hz, a natural frequency of about 1.2 kHz and a maximum acceleration > 5 g.

Original languageEnglish
Pages (from-to)53-64
Number of pages12
JournalSensors and Actuators, A: Physical
Volume84
Issue number1
DOIs
StatePublished - 1 Aug 2000
Externally publishedYes

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