Deposition of CoPtP films from citric electrolyte

O. Berkh, Yu Rosenberg, Y. Shacham-Diamand, E. Gileadi

Research output: Contribution to journalArticlepeer-review

Abstract

Magnetically hard CoPtP (up to 40 μm thickness) films for MEMS application were deposited from citrate electrolyte and considered in terms of their composition, structure, magnetic characteristics and deposition conditions. Films containing 83-92 at.% (a/o) Co were deposited in the presence of NaH2PO2 in the electrolyte, with current efficiency of about 20% (deposition rate 10-12 μm/h). Coercivity 2.7-2.8 kOe and remanence 3.0 kG were achieved magnetizing in the direction normal to the film plane. According to XRD analysis, films seem to consist of hexagonal phase of CoPt solid solutions. Current efficiency, composition and morphology of the films, as well as their magnetic characteristics, were influenced by the electrolyte prehistory and total charge passed through the electrolyte in previous operation.

Original languageEnglish
Pages (from-to)2444-2449
Number of pages6
JournalMicroelectronic Engineering
Volume84
Issue number11
DOIs
StatePublished - Nov 2007

Keywords

  • CoPtP alloys
  • Electrodeposition
  • Perpendicular anisotropy
  • Thick films

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