Controlled multibatch self-assembly of microdevices

Xiaorong Xiong*, Yael Hanein, Jiandong Fang, Yanbing Wang, Weihua Wang, Daniel T. Schwartz, Karl F. Böhringer

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

169 Scopus citations

Abstract

A technique is described for assembly of multiple batches of micro components onto a single substrate. The substrate is prepared with hydrophobic alkanethiol-coated gold binding sites. To perform assembly, a hydrocarbon oil, which is applied to the substrate, wets exclusively the hydrophobic binding sites in water. Micro components are then added to the water, and assembled on the oil-wetted binding sites. Moreover, assembly can be controlled to take place on desired binding sites by using an electrochemical method to deactivate specific substrate binding sites. By repeatedly applying this technique, different batches of micro components can be sequentially assembled to a single substrate. As a post assembly procedure, electroplating is incorporated into the technique to establish electrical connections for assembled components. Important issues presented are: substrate fabrication techniques, electrochemical modulation by using a suitable alkanethiol (dodecanethiol), electroplating of tin and lead alloy and binding site design simulations. Finally, we demonstrate a two-batch assembly of silicon square parts, and establishing electrical connectivity for assembled surface-mount light emitting diodes (LEDs) by electroplating.

Original languageEnglish
Pages (from-to)117-127
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume12
Issue number2
DOIs
StatePublished - Apr 2003
Externally publishedYes

Funding

FundersFunder number
Ford Fellowship
Tanner Research, Inc.
Technic, Inc.EIA0072744, CTS-9457097
National Science FoundationECS9875367
Intel Corporation
Agilent Technologies
Microsoft Research

    Keywords

    • Capillary force
    • Electrochemical modulation
    • Electroplating
    • Hydrophobicity
    • Interfacial energy
    • Micro assembly
    • Reductive desorption
    • Self-assembled monolayer (SAM)
    • Self-assembly
    • Surface tension

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