TY - JOUR
T1 - Controlled multibatch self-assembly of microdevices
AU - Xiong, Xiaorong
AU - Hanein, Yael
AU - Fang, Jiandong
AU - Wang, Yanbing
AU - Wang, Weihua
AU - Schwartz, Daniel T.
AU - Böhringer, Karl F.
N1 - Funding Information:
Manuscript received March 29, 2002; revised December 12, 2002. This work was supported in part by the NSF Career Award ECS9875367 to K. F. Böhringer and by donations from Agilent Technologies, Intel Corporation, Microsoft Research, Tanner Research, Inc., and Technic, Inc. The work of D. T. Schwartz was supported in part by an NSF Young Investigator Award CTS-9457097. The work of Y. Hanein was supported in part by an NSF CISE Postdoctoral Research Associateship EIA0072744. The work of X. Xiong was supported by a Ford Fellowship. Subject Editor K. D. Wise.
PY - 2003/4
Y1 - 2003/4
N2 - A technique is described for assembly of multiple batches of micro components onto a single substrate. The substrate is prepared with hydrophobic alkanethiol-coated gold binding sites. To perform assembly, a hydrocarbon oil, which is applied to the substrate, wets exclusively the hydrophobic binding sites in water. Micro components are then added to the water, and assembled on the oil-wetted binding sites. Moreover, assembly can be controlled to take place on desired binding sites by using an electrochemical method to deactivate specific substrate binding sites. By repeatedly applying this technique, different batches of micro components can be sequentially assembled to a single substrate. As a post assembly procedure, electroplating is incorporated into the technique to establish electrical connections for assembled components. Important issues presented are: substrate fabrication techniques, electrochemical modulation by using a suitable alkanethiol (dodecanethiol), electroplating of tin and lead alloy and binding site design simulations. Finally, we demonstrate a two-batch assembly of silicon square parts, and establishing electrical connectivity for assembled surface-mount light emitting diodes (LEDs) by electroplating.
AB - A technique is described for assembly of multiple batches of micro components onto a single substrate. The substrate is prepared with hydrophobic alkanethiol-coated gold binding sites. To perform assembly, a hydrocarbon oil, which is applied to the substrate, wets exclusively the hydrophobic binding sites in water. Micro components are then added to the water, and assembled on the oil-wetted binding sites. Moreover, assembly can be controlled to take place on desired binding sites by using an electrochemical method to deactivate specific substrate binding sites. By repeatedly applying this technique, different batches of micro components can be sequentially assembled to a single substrate. As a post assembly procedure, electroplating is incorporated into the technique to establish electrical connections for assembled components. Important issues presented are: substrate fabrication techniques, electrochemical modulation by using a suitable alkanethiol (dodecanethiol), electroplating of tin and lead alloy and binding site design simulations. Finally, we demonstrate a two-batch assembly of silicon square parts, and establishing electrical connectivity for assembled surface-mount light emitting diodes (LEDs) by electroplating.
KW - Capillary force
KW - Electrochemical modulation
KW - Electroplating
KW - Hydrophobicity
KW - Interfacial energy
KW - Micro assembly
KW - Reductive desorption
KW - Self-assembled monolayer (SAM)
KW - Self-assembly
KW - Surface tension
UR - http://www.scopus.com/inward/record.url?scp=0037390342&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2003.809964
DO - 10.1109/JMEMS.2003.809964
M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???
AN - SCOPUS:0037390342
SN - 1057-7157
VL - 12
SP - 117
EP - 127
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 2
ER -