Control of Vibratory MEMS Gyroscope with the Drive Mode Excited through Parametric Resonance

In this paper, we present a control strategy for a micro-electro-mechanical gyroscope with a drive mode excited through parametric resonance. The reduced order two degrees-offreedom model of the device is built, and the drive mode control is implemented using phase-locked loop (PLL) and automatic gain control (AGC) loop. A sense mode vibration control algorithm is developed as well for enhanced sensor performance. The analysis of the drive mode control loops is conducted using the multiple scales method. The robustness of the suggested control loops to parameters perturbation is demonstrated using the model. A simplified linear model of the control loops is shown to predict the device behavior with good accuracy.