Compliant Parallel Motion Linkage Amplification Mechanism for Resonant Force/Acceleration Sensing

Keyphrases

• Resonator 100%
• Amplification Mechanism 100%
• Acceleration Sensing 100%
• Parallel Motion 100%
• Reduced Order Model 33%
• Ambient Air 33%
• Design Performance 33%
• Parameter Estimation 33%
• Electrostatic Force 33%
• Model Prediction 33%
• Beam Type 33%
• Differential Measurement 33%
• Design Parameters 33%
• Finite Element Analysis 33%
• Sensing Device 33%
• Proof Mass 33%
• 2-link 33%
• Manhattan 33%
• Experimental Feasibility 33%
• Silicon-on-insulator Wafer 33%
• Resonant Sensor 33%
• Non-difference 33%
• Manufacturable 33%
• Inertial Sensors 33%
• Gap Closing 33%
• Low Parasitics 33%
• Bending Loading 33%
• Performance Estimate 33%
• Resonant Sensing 33%
• Force Amplification 33%
• Linkage Type 33%
• Parallel Linkage 33%
• Single-layer Device 33%
• Vibrating Beam Accelerometer 33%

Engineering

• Resonator 100%
• Electrostatics 33%
• Reduced Order Model 33%
• Finite Element Method 33%
• Plane Parallel 33%
• Model Prediction 33%
• Design Parameter 33%
• Feasibility Study 33%
• Open Loop 33%
• Silicon on Insulator 33%
• Sensing Device 33%
• Proof Mass 33%
• Ambient Air 33%
• Resonant Sensor 33%
• Differential Measurement 33%
• Inertial Sensor 33%

Material Science

• Resonator 100%
• Silicon 33%
• Finite Element Method 33%
• Accelerometer 33%