Comparative study of novel micromachined accelerometers employing MIDOS

O. Bochobza-Degani*, D. J. Seter, E. Socher, S. Kaldor, E. Scher, Y. Nemirovsky

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Abstract

In this paper the fabrication and characterization of a novel implementation of micromachined accelerometers is reported. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device, which consists a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics, is presented. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in details as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70[μg/√Hz] to 1[mg/√Hz] with bandwidth of 1 KHz to 4 KHz, respectively.

Original languageEnglish
Pages66-71
Number of pages6
DOIs
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
Duration: 17 Jan 199921 Jan 1999

Conference

ConferenceProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
CityOrlando, FL, USA
Period17/01/9921/01/99

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