Comparative study of novel micromachined accelerometers employing MIDOS

O. Bochobza-Degani; D. J. Seter; E. Socher; S. Kaldor; E. Scher; Y. Nemirovsky

doi:10.1109/memsys.1999.746754

Comparative study of novel micromachined accelerometers employing MIDOS

O. Bochobza-Degani^*, D. J. Seter, E. Socher, S. Kaldor, E. Scher, Y. Nemirovsky

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Abstract

In this paper the fabrication and characterization of a novel implementation of micromachined accelerometers is reported. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device, which consists a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics, is presented. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in details as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70[μg/√Hz] to 1[mg/√Hz] with bandwidth of 1 KHz to 4 KHz, respectively.

Original language	English
Pages	66-71
Number of pages	6
DOIs	https://doi.org/10.1109/memsys.1999.746754
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 17 Jan 1999 → 21 Jan 1999

Conference

Conference	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
City	Orlando, FL, USA
Period	17/01/99 → 21/01/99

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10.1109/memsys.1999.746754

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@conference{eabcc1141d9243e182a3bd0c87137cba,

title = "Comparative study of novel micromachined accelerometers employing MIDOS",

abstract = "In this paper the fabrication and characterization of a novel implementation of micromachined accelerometers is reported. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device, which consists a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics, is presented. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in details as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70[μg/√Hz] to 1[mg/√Hz] with bandwidth of 1 KHz to 4 KHz, respectively.",

author = "O. Bochobza-Degani and Seter, {D. J.} and E. Socher and S. Kaldor and E. Scher and Y. Nemirovsky",

note = "Funding Information: This research is supported by the Israeli Ministry of Science. The authors would like to acknowledge Mr. Avi Shai and Mr. Yosi Leivovich help in bonding and packaging of the prototypes.; null ; Conference date: 17-01-1999 Through 21-01-1999",

year = "1999",

doi = "10.1109/memsys.1999.746754",

language = "אנגלית",

pages = "66--71",

}

Bochobza-Degani, O, Seter, DJ, Socher, E, Kaldor, S, Scher, E & Nemirovsky, Y 1999, 'Comparative study of novel micromachined accelerometers employing MIDOS', Paper presented at Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, Orlando, FL, USA, 17/01/99 - 21/01/99 pp. 66-71. https://doi.org/10.1109/memsys.1999.746754

TY - CONF

T1 - Comparative study of novel micromachined accelerometers employing MIDOS

AU - Bochobza-Degani, O.

AU - Seter, D. J.

AU - Socher, E.

AU - Kaldor, S.

AU - Scher, E.

AU - Nemirovsky, Y.

N1 - Funding Information: This research is supported by the Israeli Ministry of Science. The authors would like to acknowledge Mr. Avi Shai and Mr. Yosi Leivovich help in bonding and packaging of the prototypes.

PY - 1999

Y1 - 1999

N2 - In this paper the fabrication and characterization of a novel implementation of micromachined accelerometers is reported. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device, which consists a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics, is presented. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in details as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70[μg/√Hz] to 1[mg/√Hz] with bandwidth of 1 KHz to 4 KHz, respectively.

AB - In this paper the fabrication and characterization of a novel implementation of micromachined accelerometers is reported. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device, which consists a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics, is presented. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in details as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70[μg/√Hz] to 1[mg/√Hz] with bandwidth of 1 KHz to 4 KHz, respectively.

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U2 - 10.1109/memsys.1999.746754

DO - 10.1109/memsys.1999.746754

M3 - הרצאה

AN - SCOPUS:0032626708

SP - 66

EP - 71

Y2 - 17 January 1999 through 21 January 1999

ER -

Comparative study of novel micromachined accelerometers employing MIDOS

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