TY - JOUR
T1 - Comparative study of novel micromachined accelerometers employing MIDOS
AU - Bochobza-Degani, O.
AU - Seter, D. J.
AU - Socher, E.
AU - Nemirovsky, Y.
N1 - Funding Information:
This research is supported by the Israeli Ministry of Science. The authors would like to acknowledge Mr. Avi Shai and Mr. Yosi Leivovich help in bonding and packaging of the prototypes.
PY - 2000/3/10
Y1 - 2000/3/10
N2 - This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.
AB - This paper reports on the fabrication and characterization of a novel implementation of micromachined accelerometers. The accelerometers employ a new sensing technique, the modulated integrative differential optical sensing (MIDOS), to sense the output displacements of their proof-mass. The fabrication process of the hybrid device is presented. The device consists of a bulk micromachined mechanical part attached by indium bumps to a CMOS chip containing photodetectors and readout electronics. Several prototypes were fabricated and characterized. The differences between the prototypes are discussed in detail as well as the comparison between their measured characteristics (noise equivalent acceleration (NEA), bandwidth and linearity). The prototypes have demonstrated NEA ranging from 70 (μg/√Hz) to 1 (mg/√Hz) with bandwidth of 1 KHz to 4 KHz.
UR - http://www.scopus.com/inward/record.url?scp=0033880769&partnerID=8YFLogxK
U2 - 10.1016/S0924-4247(99)00253-8
DO - 10.1016/S0924-4247(99)00253-8
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AN - SCOPUS:0033880769
SN - 0924-4247
VL - 80
SP - 91
EP - 99
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 2
T2 - 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99)
Y2 - 17 January 1999 through 21 January 1999
ER -
