Collective dynamics of arrays of micro cantilevers interacting through fringing electrostatic fields

Slava Krylov, Stella Lulinsky, Bojan R. Ilic, Inbar Schneider

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We investigate the collective nonlinear behavior of an array of micro cantilevers interacting by fringing electrostatic fields and fabricated of silicon on insulator (SOI) wafer. The interaction is due to the mechanical coupling originated in the flexibility of the anchor and of the electrostatic coupling through voltagedependent electrostatic force. In the framework of the reduced order model based on the Galerkin decomposition the array is considered as an assembly of single degree of freedom oscillators. The mechanical coupling matrix is extracted using the full scale finite element analysis of the array while the electrostatic force is approximated by a fit build using the three-dimensional numerical simulation. We show numerically and experimentally that large amplitude collective vibrations of the array can be achieved using parametric excitation while the dynamic properties of the array can be efficiently tuned by the applied voltage.

Original languageEnglish
Title of host publication19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791846353
DOIs
StatePublished - 2014
EventASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2014 - Buffalo, United States
Duration: 17 Aug 201420 Aug 2014

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2014
Country/TerritoryUnited States
CityBuffalo
Period17/08/1420/08/14

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