Coherently Embedded Ag Nanostructures in Si: 3D Imaging and their application to SERS

R. R. Juluri, A. Rath, A. Ghosh, A. Bhukta, R. Sathyavathi, D. Narayana Rao, Knut Müller, Marco Schowalter, Kristian Frank, Tim Grieb, Florian Krause, A. Rosenauer, P. V. Satyam*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Surface enhanced Raman spectroscopy (SERS) has been established as a powerful tool to detect very low-concentration bio-molecules. One of the challenging problems is to have reliable and robust SERS substrate. Here, we report on a simple method to grow coherently embedded (endotaxial) silver nanostructures in silicon substrates, analyze their three-dimensional shape by scanning transmission electron microscopy tomography and demonstrate their use as a highly reproducible and stable substrate for SERS measurements. Bi-layers consisting of Ag and GeOx thin films were grown on native oxide covered silicon substrate using a physical vapor deposition method. Followed by annealing at 800°C under ambient conditions, this resulted in the formation of endotaxial Ag nanostructures of specific shape depending upon the substrate orientation. These structures are utilized for detection of Crystal Violet molecules of 5 × 10-10M concentrations. These are expected to be one of the highly robust, reusable and novel substrates for single molecule detection.

Original languageEnglish
Article number4633
JournalScientific Reports
StatePublished - 10 Apr 2014
Externally publishedYes


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