Characterization of sputtered LiNbO3 films for integrated optics applications

G. Griffel; S. Ruschin; A. Hardy; M. Itzkovitz; N. Croitoru

doi:10.1016/0040-6090(85)90309-8

Characterization of sputtered LiNbO₃ films for integrated optics applications

G. Griffel^*, S. Ruschin, A. Hardy, M. Itzkovitz, N. Croitoru

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

LiNbO₃ films were deposited onto Corning glass substrates by r.f. sputtering in a reactive Ar-10% O₂ atmosphere. A systematic study of the influence of sputtering parameters such as substrate temperature, r.f. sputtering power and partial oxygen pressure was carried out. The sample composition was analysed using electron diffraction, electron microscopy and Auger electron spectroscopy. It was found that the films are amorphous at a given critical temperature and r.f. power. Beyond this critical temperature the films are polycrystalline and the grain size depends strongly on the substrate temperature. The scattered light along the surface of the deposited LiNbO₃ film guides was detected using optical fibre scanning and the attenuation was determined as a function of sputtering parameters. Loss figures of about 3-6 dB cm^-1 were obtained.

Original language	English
Pages (from-to)	185-189
Number of pages	5
Journal	Thin Solid Films
Volume	126
Issue number	3-4
DOIs	https://doi.org/10.1016/0040-6090(85)90309-8
State	Published - 26 Apr 1985

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title = "Characterization of sputtered LiNbO3 films for integrated optics applications",

abstract = "LiNbO3 films were deposited onto Corning glass substrates by r.f. sputtering in a reactive Ar-10% O2 atmosphere. A systematic study of the influence of sputtering parameters such as substrate temperature, r.f. sputtering power and partial oxygen pressure was carried out. The sample composition was analysed using electron diffraction, electron microscopy and Auger electron spectroscopy. It was found that the films are amorphous at a given critical temperature and r.f. power. Beyond this critical temperature the films are polycrystalline and the grain size depends strongly on the substrate temperature. The scattered light along the surface of the deposited LiNbO3 film guides was detected using optical fibre scanning and the attenuation was determined as a function of sputtering parameters. Loss figures of about 3-6 dB cm-1 were obtained.",

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AU - Griffel, G.

AU - Ruschin, S.

AU - Hardy, A.

AU - Itzkovitz, M.

AU - Croitoru, N.

PY - 1985/4/26

Y1 - 1985/4/26

N2 - LiNbO3 films were deposited onto Corning glass substrates by r.f. sputtering in a reactive Ar-10% O2 atmosphere. A systematic study of the influence of sputtering parameters such as substrate temperature, r.f. sputtering power and partial oxygen pressure was carried out. The sample composition was analysed using electron diffraction, electron microscopy and Auger electron spectroscopy. It was found that the films are amorphous at a given critical temperature and r.f. power. Beyond this critical temperature the films are polycrystalline and the grain size depends strongly on the substrate temperature. The scattered light along the surface of the deposited LiNbO3 film guides was detected using optical fibre scanning and the attenuation was determined as a function of sputtering parameters. Loss figures of about 3-6 dB cm-1 were obtained.

AB - LiNbO3 films were deposited onto Corning glass substrates by r.f. sputtering in a reactive Ar-10% O2 atmosphere. A systematic study of the influence of sputtering parameters such as substrate temperature, r.f. sputtering power and partial oxygen pressure was carried out. The sample composition was analysed using electron diffraction, electron microscopy and Auger electron spectroscopy. It was found that the films are amorphous at a given critical temperature and r.f. power. Beyond this critical temperature the films are polycrystalline and the grain size depends strongly on the substrate temperature. The scattered light along the surface of the deposited LiNbO3 film guides was detected using optical fibre scanning and the attenuation was determined as a function of sputtering parameters. Loss figures of about 3-6 dB cm-1 were obtained.

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Characterization of sputtered LiNbO₃ films for integrated optics applications

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