Challenges in ULSI Interconnects: Introduction to the Book

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationAdvanced Nanoscale ULSI Interconnects
Subtitle of host publicationFundamentals and Applications
EditorsYosi Shacham-Diamand, Tetsuya Osaka, Madhav Datta, Takayuki Ohba
Place of PublicationNew York, NY
PublisherSpringer New York; Imprint: Springer
Chapter1
Pages3-11
Edition1st ed. 2009
ISBN (Electronic)0387958681, 978-0-387-95868-2
ISBN (Print)978-0-387-95867-5
DOIs
StatePublished - 2009

ULI Keywords

  • uli
  • Chemical engineering
  • Electrical engineering
  • Electrochemistry
  • Materials science
  • Nanotechnology
  • הנדסת חשמל
  • אלקטרוכימיה
  • ננוטכנולוגיה
  • Chemistry, Industrial
  • Engineering, Chemical
  • Industrial chemistry -- Chemical engineering
  • Electric engineering
  • Material science
  • Molecular technology
  • Nanoscale technology

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