TY - GEN
T1 - Bouncing mode electrostatically actuated scanning micromirror for laser display applications
AU - Krylov, Viacheslav
AU - Barnea, Daniel I.
PY - 2004
Y1 - 2004
N2 - In laser display applications, the necessity to create images free of distortions imposes specific requirements on the motion of scanning devices. We present an approach of a scanning micromirror operation that is aimed to fulfill the requirements of motion linearity, high operational frequency and low actuation voltages. The operational mode incorporates a contact event between the mirror and an elastic constraint followed by a bouncing event and a subsequent inversion of motion. A stable limit cycle with voltage-dependent frequency and triangular response signal is obtained by the application of an actuation voltage which is piecewise constant in time. Approximate expressions relating the frequency and amplitude of the response with the actuating voltage are obtained by energy balance method. The influence of contact losses on the response as well as the stability of the limit cycle are studied numerically.
AB - In laser display applications, the necessity to create images free of distortions imposes specific requirements on the motion of scanning devices. We present an approach of a scanning micromirror operation that is aimed to fulfill the requirements of motion linearity, high operational frequency and low actuation voltages. The operational mode incorporates a contact event between the mirror and an elastic constraint followed by a bouncing event and a subsequent inversion of motion. A stable limit cycle with voltage-dependent frequency and triangular response signal is obtained by the application of an actuation voltage which is piecewise constant in time. Approximate expressions relating the frequency and amplitude of the response with the actuating voltage are obtained by energy balance method. The influence of contact losses on the response as well as the stability of the limit cycle are studied numerically.
UR - http://www.scopus.com/inward/record.url?scp=21244433991&partnerID=8YFLogxK
U2 - 10.1115/trib2004-64383
DO - 10.1115/trib2004-64383
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AN - SCOPUS:21244433991
SN - 0791841812
SN - 9780791841815
T3 - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
SP - 169
EP - 176
BT - Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
PB - American Society of Mechanical Engineers
T2 - 2004 ASME/STLE International Joint Tribology Conference
Y2 - 24 October 2004 through 27 October 2004
ER -