Bouncing mode electrostatically actuated scanning micromirror for laser display applications

Viacheslav Krylov, Daniel I. Barnea

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In laser display applications, the necessity to create images free of distortions imposes specific requirements on the motion of scanning devices. We present an approach of a scanning micromirror operation that is aimed to fulfill the requirements of motion linearity, high operational frequency and low actuation voltages. The operational mode incorporates a contact event between the mirror and an elastic constraint followed by a bouncing event and a subsequent inversion of motion. A stable limit cycle with voltage-dependent frequency and triangular response signal is obtained by the application of an actuation voltage which is piecewise constant in time. Approximate expressions relating the frequency and amplitude of the response with the actuating voltage are obtained by energy balance method. The influence of contact losses on the response as well as the stability of the limit cycle are studied numerically.

Original languageEnglish
Title of host publicationProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
PublisherAmerican Society of Mechanical Engineers
Pages169-176
Number of pages8
EditionPART A
ISBN (Print)0791841812, 9780791841815
DOIs
StatePublished - 2004
Event2004 ASME/STLE International Joint Tribology Conference - Long Beach, CA, United States
Duration: 24 Oct 200427 Oct 2004

Publication series

NameProceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2004
NumberPART A

Conference

Conference2004 ASME/STLE International Joint Tribology Conference
Country/TerritoryUnited States
CityLong Beach, CA
Period24/10/0427/10/04

Fingerprint

Dive into the research topics of 'Bouncing mode electrostatically actuated scanning micromirror for laser display applications'. Together they form a unique fingerprint.

Cite this