In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.
- Mechanical sensors
- compliant suspension
- microelectromechanical system (MEMS)
- rotational actuator
- sensor applications