TY - JOUR
T1 - Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension
AU - Benjamin, Erez
AU - Maimon, Ronen
AU - Krylov, Slava
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2023/10/1
Y1 - 2023/10/1
N2 - In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.
AB - In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.
KW - Mechanical sensors
KW - bistability
KW - compliant suspension
KW - microelectromechanical system (MEMS)
KW - rotational actuator
KW - sensor applications
UR - http://www.scopus.com/inward/record.url?scp=85171542237&partnerID=8YFLogxK
U2 - 10.1109/LSENS.2023.3312994
DO - 10.1109/LSENS.2023.3312994
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AN - SCOPUS:85171542237
SN - 2475-1472
VL - 7
JO - IEEE Sensors Letters
JF - IEEE Sensors Letters
IS - 10
M1 - 2503904
ER -