Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension

Erez Benjamin*, Ronen Maimon, Slava Krylov

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this letter, we report on a new design of an in-plane moving, simple, robust, and manufacturable rotational device with integrated electrostatic actuation. The architecture, based on three off-center anchored beams, enables tailoring of the device bistability, while the combination of high rotational compliance with high lateral stiffness allows to achieve large tilting angles without actuation-related instabilities. The devices were fabricated from silicon on insulator wafers and consistently with the finite-elements model prediction, their bistable behavior and rotation angles up to 11circ were demonstrated in the experiment.

Original languageEnglish
Article number2503904
JournalIEEE Sensors Letters
Volume7
Issue number10
DOIs
StatePublished - 1 Oct 2023

Keywords

  • Mechanical sensors
  • bistability
  • compliant suspension
  • microelectromechanical system (MEMS)
  • rotational actuator
  • sensor applications

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