@inproceedings{856a433f1dba4799b8a589c4db40a423,
title = "Bistable force\acceleration sensor based on pull-in voltage monitoring",
abstract = "We report on experimental demonstration of force\acceleration sensing based on pull-in voltage monitoring in a fully compliant contactless bistable device, electrostatically actuated by a parallel-plate electrode. The device is suspended using initially curved flexible beams pulled by nonlinear electrostatic forces directed along the beams. A design parameters optimization reduced the sensitivity to fabrication tolerances and assured the presence of a bistable configuration in the device.",
keywords = "Accelerometer, Bistability, Fully compliant, MEMS, Pull-in",
author = "Benjamin, {Erez B.} and Stella Lullinsky and Slava Krylov",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016 ; Conference date: 22-02-2016 Through 25-02-2016",
year = "2016",
month = mar,
day = "17",
doi = "10.1109/ISISS.2016.7435557",
language = "אנגלית",
series = "IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "109--112",
booktitle = "IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings",
address = "ארצות הברית",
}