Bistability under tension and its use in a threshold force sensor

S. Rabanim; E. Amir; D. Schreiber; S. Krylov

doi:10.1109/MEMSYS.2012.6170363

Bistability under tension and its use in a threshold force sensor

S. Rabanim, E. Amir, D. Schreiber, S. Krylov^*

^*Corresponding author for this work

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on a first experimental demonstration of a bistability phenomenon in a contactless device suspended using initially curved flexible beams and pulled by electrostatic forces directed along the beams. Devices of several configurations were fabricated from a silicon on insulator (SOI) substrate using a deep reactive ion etching (DRIE) based process and were actuated in-plane in ambient air conditions. We introduce a novel, less sensitive to the fabrication tolerances, operational scenario involving actuation by two parallel-plate electrodes and demonstrate that the bistable device can be used as a force sensor based on a pull-in voltage monitoring.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1137-1140
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170363
State	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

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10.1109/MEMSYS.2012.6170363

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Rabanim, S., Amir, E., Schreiber, D., & Krylov, S. (2012). Bistability under tension and its use in a threshold force sensor. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1137-1140). Article 6170363 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170363

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title = "Bistability under tension and its use in a threshold force sensor",

abstract = "We report on a first experimental demonstration of a bistability phenomenon in a contactless device suspended using initially curved flexible beams and pulled by electrostatic forces directed along the beams. Devices of several configurations were fabricated from a silicon on insulator (SOI) substrate using a deep reactive ion etching (DRIE) based process and were actuated in-plane in ambient air conditions. We introduce a novel, less sensitive to the fabrication tolerances, operational scenario involving actuation by two parallel-plate electrodes and demonstrate that the bistable device can be used as a force sensor based on a pull-in voltage monitoring.",

author = "S. Rabanim and E. Amir and D. Schreiber and S. Krylov",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170363",

language = "אנגלית",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1137--1140",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Rabanim, S, Amir, E, Schreiber, D & Krylov, S 2012, Bistability under tension and its use in a threshold force sensor. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170363, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1137-1140, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170363

Bistability under tension and its use in a threshold force sensor. / Rabanim, S.; Amir, E.; Schreiber, D. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1137-1140 6170363 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - We report on a first experimental demonstration of a bistability phenomenon in a contactless device suspended using initially curved flexible beams and pulled by electrostatic forces directed along the beams. Devices of several configurations were fabricated from a silicon on insulator (SOI) substrate using a deep reactive ion etching (DRIE) based process and were actuated in-plane in ambient air conditions. We introduce a novel, less sensitive to the fabrication tolerances, operational scenario involving actuation by two parallel-plate electrodes and demonstrate that the bistable device can be used as a force sensor based on a pull-in voltage monitoring.

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Y2 - 29 January 2012 through 2 February 2012

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Bistability under tension and its use in a threshold force sensor

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